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Category: Cap. Diaphragm Gauge Heated

The CDG025D-X3 Capacitance Diaphragm Gauge high temperature manometers for accurate total pressure measurement and control. CDG gauges are temperature controlled for superior performance in demanding semiconductor and plasma processes. with all common flange types and fieldbus interfaces and provide a linear 0 to 10 V, pressure signal.

The standard configuration includes a sensor with two set points, for double protection from contamination and fast recovery from atmospheric pressure. It offers a push button or remote signal for zero command, and there is no need for long-term recalibration. Additionally, you have the option to integrate DeviceNet, Profibus, or EtherCAT.

Pressure range               full scale from 0,13 mbar to 1333 mBar (0,1 Torr to 1000 Torr)

Setpoint accuracy:        1-1000 Torr 0,2%, <1 Torr 0,5%

For more information click here

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