Low Pressure Plasma Sources
These plasma sources are designed to be used equally in R&D laboratories and industry for a very large range of applications. Typical applications of such source are generation of radicals (e.g. atomic oxygen), etching, PECVD and surface treatment. We offer different plasma sources for different vacuum pressure levels.
In case of multiple plasma sources, our solid state modules can be integrated and the control can be done via CANopen® or via a control rack with touch screen.
Showing all 14 results
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1X200W Aura-Wave ECR plasma source complete setup for 1 source
Part Number: Aura-Wave-Assy-OnePrice unavailable, request quote -
1X200W Hi-Wave collisional type plasma source complete setup for 1 source
Part Number: Hi-Wave-Assy-OnePrice unavailable, request quote -
1X450W Aura-Wave ECR plasma source complete setup for 1 source
Part Number: Aura-Wave-Assy-One-450Price unavailable, request quote -
1X450W Hi-Wave collisional type plasma source complete setup for 1 source
Part Number: Hi-Wave-Assy-One-450Price unavailable, request quote -
4X200W Aura-Wave ECR plasma source complete setup for 4 sources
Part Number: Aura-Wave-Assy-FourPrice unavailable, request quote -
4X200W Hi-Wave collisional type plasma source complete setup for 4 sources
Part Number: Hi-Wave-Assy-FourPrice unavailable, request quote -
4X450W Aura-Wave ECR plasma source complete setup for 4 sources
Part Number: Aura-Wave-Assy-Four-450Price unavailable, request quote -
4X450W Hi-Wave collisional type plasma source complete setup for 4 sources
Part Number: Hi-Wave-Assy-Four-450Price unavailable, request quote -
Aura Wave ECR type plasma source on DN40CF flange
Part Number: Aura-Wave-CF40Price unavailable, request quote -
Aura Wave ECR type plasma source on DN40KF flange
Part Number: Aura-Wave-KF40Price unavailable, request quote -
Aura Wave ECR type plasma source on DN63CF flange
Part Number: Aura-Wave-CF63Price unavailable, request quote -
Hi Wave Collisional type plasma source on DN40CF flange
Part Number: Hi-Wave-CF40Price unavailable, request quote -
Hi Wave Collisional type plasma source on DN40KF flange
Part Number: Hi-Wave-KF40Price unavailable, request quote -
Hi Wave Collisional type plasma source on DN63CF flange
Part Number: Hi-Wave-CF63Price unavailable, request quote
Showing all 14 results