Transfer & Positioning Systems

Range of Custom designed Transfer Systems.
– Magnetically-Coupled Transfer System that can position a loaded cassette into a multitude of different chambers.
– Motorized Transport system with Quartz Rod to transfer a wafer into a furnace.
– Custom system with Six Heavy-Duty Manipulators, each with a coupling force of 180 lbs.
– Modified and Custom Loadlocks.
– UHV linear Guide
– 5-Axis Gonionmeter with heating and cooling capability.

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