Range of Custom designed Transfer Systems.
– Magnetically-Coupled Transfer System that can position a loaded cassette into a multitude of different chambers.
– Motorized Transport system with Quartz Rod to transfer a wafer into a furnace.
– Custom system with Six Heavy-Duty Manipulators, each with a coupling force of 180 lbs.
– Modified and Custom Loadlocks.
– UHV linear Guide
– 5-Axis Gonionmeter with heating and cooling capability.
NL-1723 HW Scharwoude
NL-1723 ZG Noord-Scharwoude
T +31 (0)226 33 21 00
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