Smooth Venting Valve
Two-stage valve with adjustable flow rate between 2 and 200 l/minute. This valve combines 2 functions in one valve body and can be used for purching of vacuum sytems in semiconductor industry and R&D applications. The main valve and the sub-valve flow rate can be adjusted to offer a smooth turbulence free purging, combined with a rough venting with the second main-valve stage
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