Pneumatic operated bellow sealed angle valve, Aluminum body double acting with double Solenoid, DN80ISO-K

The XLA, a Normally Closed, and the XLC, a Double Acting Aluminum High Vacuum Angle Valve, both incorporate Bellows Seals. These valves feature aluminum bodies ensuring uniform baking temperatures and minimal outgassing.

They boast high corrosion resistance to fluorine gas, are lightweight and compact, and offer minimal contamination from heavy metals. The bellows type is particulate-free, while the pressure balance mechanism allows unrestricted exhaust direction.

Additionally, an overtravel mechanism ensures constant O-ring compression for sizes 50, 63, and 80.

Leakrate: 1.10 e-10 mbar.l/sec