Category: Atmospheric Plasma Sources

Atmospheric Plasma Sources are used, over dense plasmas, high ion and active species densities. Alongside high-temperature plasmas at atmospheric pressure. Their versatility is highlighted by an exceptionally broad operating pressure range, accommodating various applications effectively. Moreover, these sources are electrodeless, ensuring independence from targets and substrate bias voltage.

Downstream plasma source is ideal for working at pressures between 10-1 mbar and a few tens of mbar with dielectric tubes diameters between 30 and 50 mm. Gas types: Ar, N2, O2, CH4, He, air,.. with maximum power 6 kW.

Surfaguide is ideal for working in the atmospheric pressure range with dielectric tubes diameters between 10 and 20 mm and could equally work in the mbar range and down to a few 10-2 mbar. Gas types: Ar, N2, O2, He, air, … with maximum power 6 kW.

S-Wave (named after Surface Wave plasma source) is a compact plasma torch that operates in the range of a few 10-2 mbar to atmospheric pressure. The plasma is created in a dielectric tube placed inside the source. Gas types: Argon or argon based gas mixture at atmospheric pressure. All gases at reduced pressure with maximum power 300 W.